Heterogeneous integration through electrokinetic migration
PUBLICATION TYPE:
Journal Article
AUTHORS:
Mihrimah Ozkan; Ozkan, Cengiz S.; Kibar, O.; Wang, M.M.; Sangeeta N Bhatia; S. Esener
SOURCE:
Engineering in Medicine and Biology Magazine, IEEE, Volume 20, Issue 6, p.144-151 (2001)
URL:
https://ieeexplore.ieee.org/document/982286?arnumber=982286
ABSTRACT:
We apply basic electrophoretic motion to semiconductor materials engineering for development of the next level of heterogeneous integration technology. Furthermore, we demonstrate the utility of these tools in integration of inorganic devices with biological species in order to explore the utility of these tools in biotechnological applications.Electrical and optical addressing techniques are shown to allow for more rapid and parallel patterning of biological species and inorganic objects.